NDLI: Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons

Content Provider	IEEE Xplore Digital Library
Author	Jeng, M. Xiaolan Xie
Copyright Year	2001
Description	Author affiliation: Dept. of Electr. Eng., Nat. Taiwan Ocean Univ., China (Jeng, M.)
Abstract	Degraded behavior, such as reworks, failures, and maintenance, of a semiconductor manufacturing system (SMS) is not negligible in practice. When modeled by Petri nets, degraded behavior may be represented as initially-unmarked elementary circuits, interpreted as local processing cycles. Most existing "well-behaved" net classes for manufacturing have problems with describing such cycles and thus may have difficulties in modeling SMSs. We extend the class of nets in Jeng and DiCesare (1995) into the class of RCN* merged nets that model SMSs with such cycles. To model an SMS, we first describe the behavior of each resource type using a state-machine module, called RCN. Any RCN can be constructed as a connection of acyclic sub-nets called blocks, where one of them denotes the normal behavior of the resource type and the others denote its degraded behavior. Next, an RCN* merged net for the entire system is built by fusing all modules, conforming to three constraints, along their common transition sub-nets, which represent their synchronization. In the analysis of RCN* merged nets, we prove that their liveness and reversibility depend on the absence of unmarked siphons, which are structural objects that mixed integer programming can check rapidly. Examples are given to illustrate the proposed approach.
Sponsorship	IEEE Robotics & Autom. Soc
Starting Page	52
Ending Page	57
File Size	826843
Page Count	6
File Format	PDF
ISBN	0780365763
ISSN	10504729
DOI	10.1109/ROBOT.2001.932529
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-05-21
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Manufacturing systems Degradation Petri nets Virtual manufacturing Fabrication Semiconductor device modeling Semiconductor device manufacture Performance analysis Integrated circuit modeling Oceans
Content Type	Text
Resource Type	Article
Subject	Artificial Intelligence Control and Systems Engineering Electrical and Electronic Engineering Software

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