NDLI: Dynamic scheduling rule selection for semiconductor wafer fabrication

Content Provider	IEEE Xplore Digital Library
Author	Bo-Wei Hsieh Shi-Chung Chang Chun-Hung Chen
Copyright Year	2001
Description	Author affiliation: Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan (Bo-Wei Hsieh)
Abstract	We exploit the speed of an ordinal optimization (OO)-based simulation tool designed by Hsieh et al. (1999) to investigate dynamic selection of scheduling rules for semiconductor wafer fabrication (FAB). Although a scheduling rule is a combination of loading wafer release and dispatching rules, this paper specifically focuses on dispatching when significant amount of wafers-in-process are held due to engineering causes and when major machine failures occur. Four prominent dispatching rules combined with the wafer release policy of workload regulation constitute a basic set of rule options. The dispatching rule may be weekly selected based on FAB states over a four-week horizon. A total of 756 rule options are then evaluated and ranked by the OO-based simulation tool under the performance index of mean cycle time and throughput rate. Results demonstrate the value of dynamic rule selection for uncertainty handling, the insightful selection of good rules and the needs for further research.
Sponsorship	IEEE Robotics & Autom. Soc
Starting Page	535
Ending Page	540
File Size	625735
Page Count	6
File Format	PDF
ISBN	0780365763
ISSN	10504729
DOI	10.1109/ROBOT.2001.932605
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-05-21
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Dynamic scheduling Fabrication Dispatching Job shop scheduling Modeling Processor scheduling Performance analysis Uncertainty Optimal control Industrial engineering
Content Type	Text
Resource Type	Article
Subject	Artificial Intelligence Control and Systems Engineering Electrical and Electronic Engineering Software

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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