NDLI: Low cost nanoimprinted polymer waveguides

Content Provider	IEEE Xplore Digital Library
Author	Ting Han Madden, S. Zhang, M. Charters, R. Luther-Davies, B.
Copyright Year	2008
Description	Author affiliation: RPO Inc., Acton, ACT (Charters, R.) \|\| Laser Phys. Center, Australian Nat. Univ., ACT (Ting Han; Madden, S.; Zhang, M.; Luther-Davies, B.)
Abstract	We report here on the use of nanoimprint technology to fabricate low cost planar waveguides in a Polysiloxane polymer system capable of passing the stringent Telcordia environmental and reliability criteria. Low loss buried channel waveguides with core cross sections of 3 times 3 microns and a 2% refractive index contrast were fabricated on bare silicon wafers with a simple and fast four step process using a 100 mm diameter polydimethylsiloxane (PDMS) stamp. The waveguides were patterned using an innovative ldquominimum fluid displacementrdquo method which eliminated the residual films often seen either side of rib like features such as the waveguide cores, and which also produced very good dimensional control of the core itself regardless of the uncured spun core layer thickness.
Starting Page	185
Ending Page	188
File Size	710836
Page Count	4
File Format	PDF
ISBN	9781424427161
ISSN	10972137
DOI	10.1109/COMMAD.2008.4802122
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-07-28
Publisher Place	Australia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Costs Optical waveguides Optical polymers Optical materials Optical devices Optical refraction Optical resonators Optical variables control Waveguide lasers Refractive index Polysiloxane Nanoimprint Waveguide
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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