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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Shih-Hsorng Shen Shuenn-Tsong Young Weileun Fang |
| Copyright Year | 2002 |
| Description | Author affiliation: Inst. of Biomed. Eng., Nat. Yang Ming Univ., Taipei, Taiwan (Shih-Hsorng Shen; Shuenn-Tsong Young) |
| Abstract | A novel MEMS filter bank was developed for hearing aids application. It directly processes the sound signals by separating the sound into specific frequency bands. Therefore, the filter bank can replace some function of the microphone and the processor within the modern hearing aids. Such a MEMS filter bank works as a passive component, and it has the advantages of lower energy consumption and without computation time. Combining with its excellent aging and thermal stability characteristics, the novel MEMS filter bank will be a potential device for effective sound signal processing in modern hearing aids. The paper shows the fabrication process of the novel MEMS filter bank. Our preliminary results show that the device dimensions of the filter bank are about millimeter level for the low operating frequency requirement, 100 Hz to 10000 Hz. The devices are then apparent bending by residual stress with low stress silicon nitride film. |
| Starting Page | 352 |
| Ending Page | 355 |
| File Size | 524362 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780374800 |
| DOI | 10.1109/MMB.2002.1002345 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2002-05-02 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fabrication Micromechanical devices Filter bank Hearing aids Frequency Residual stresses Signal processing Microphones Energy consumption Aging |
| Content Type | Text |
| Resource Type | Article |
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