NDLI: Micromechanical tunneling probes and actuators on a silicon chip

Content Provider	IEEE Xplore Digital Library
Author	Toshiyoshi, H. Mita, M. Goto, M. Hashiguchi, G. Fujita, P. Kobayashi, D. Endo, J. Wada, Y.
Copyright Year	1999
Description	Author affiliation: Inst. of Ind. Sci., Tokyo Univ., Japan (Toshiyoshi, H.)
Abstract	With the promotion of SPM technology, scientific interest has expanded from visual observation of static nanometric structures to in-situ investigation of mesoscopic phenomena, such as quantized electrical conductance of atom bridges. Bringing two probes or more into a tunneling distance is needed to determine the transfer function of the nanometric specimen. Technical difficulties lie in reducing the tip radius and the total size of the tip-positioning mechanism. For this reason we have previously proposed lateral tunneling unit that is a tunneling probe integrated with an electrostatic actuator produced by silicon micromachining technique. Size reduction of the whole SPM systems was found to work in favor of improving the control accuracy of tip-positioning as well as suppressing the effects of thermal drift and external vibration. Based upon these results we have recently developed such one-chip STM (scanning tunneling microscope) which is small enough to be loaded in the chamber of the transmission electron microscope. A pair of pre-aligned sharp tunneling tips has been successfully fabricated by the combination of deep dry etching and stress induced oxidation of silicon. The mutual distance of the tips is controlled by using the integrated electrostatic microactuators. The device enables us to in-situ observe atom scale phenomena in the tunneling gap.
Starting Page	180
Ending Page	181
File Size	346826
Page Count	2
File Format	PDF
ISBN	4930813972
DOI	10.1109/IMNC.1999.797536
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-07-06
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Japan Soc. Of Applied Physics
Subject Keyword	Micromechanical devices Tunneling Actuators Silicon Scanning probe microscopy Scanning electron microscopy Transmission electron microscopy Nanostructures Atomic measurements Bridges
Content Type	Text
Resource Type	Article

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