NDLI: Investigation of the microcantilevers by the photoacoustic elastic bending method

Content Provider	IEEE Xplore Digital Library
Author	Todorovic, D.M. Jovic, V. Radulovic, K.T. Sarajlic, M. Markushev, D. Rabasovic, M.D.
Copyright Year	2014
Description	Author affiliation: Inst. for Phys., Univ. of Belgrade, Belgrade, Serbia (Markushev, D.; Rabasovic, M.D.) \|\| Inst. for Multidiscipl. Res., Univ. of Belgrade, Belgrade, Serbia (Todorovic, D.M.) \|\| Inst. for Chem., Technol. & Metall., Belgrade, Serbia (Jovic, V.; Radulovic, K.T.; Sarajlic, M.)
Abstract	The amplitude of the photoacoustic (PA) elastic bending signals vs. the modulation frequency of the excitation optical beam for the chip with Si cantilevers were measured and analyzed. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA spectra were measured in a frequency range from 20 to 20000 Hz. The signal in the PA cell without optical excitation (noise) was also measured and analyzed. Experimental results show that the PA measuring system (PA cell width electret's microphone and lock-in amplifier) has signal-noise ratio S/N ~ 30000 at 100 Hz; ~ 3000 at 1000 Hz; ~ 5 at 10000 Hz. The correction of the measured signal, in order to remove the coherent electronic noise as a systematic error, was made. The experimental PA elastic bending signals of the cantilever were compared with the experimental PA elastic bending signals of the Si square membranes. These results showed that the PA elastic bending method is convenient for investigation the characteristics of micromechanical structures as microcantilevers.
Starting Page	171
Ending Page	174
File Size	276725
Page Count	4
File Format	PDF
ISBN	9781479952953
e-ISBN	9781479952960
DOI	10.1109/MIEL.2014.6842113
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-05-12
Publisher Place	Serbia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Frequency measurement Semiconductor device measurement Microphones Frequency modulation Optical variables measurement Noise
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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