NDLI: Characterization of power VDMOSFETs by split C-V measurements

Content Provider	IEEE Xplore Digital Library
Author	Habas, P. Mileusnic, S. Zivanov, T.
Copyright Year	1999
Description	Author affiliation: Dept. of Device Eng., Philips Semicond., Nijmegen, netherlands (Habas, P.)
Abstract	Split C-V measurements are evaluated as a characterization method for power VDMOSFETs. The measurement of the gate total capacitance results for VDMOSFETs in a complex curve which is superposition of the electron and hole, accumulation, depletion and inversion contributions of different interface regions. As opposed, in the split C-V measurements, giving gate-drain and gate-source capacitance, the electron and hole contributions of particular interface areas are separated. The structure of the split C-V characteristics and the gate total capacitance of a VDMOS cell is clarified. Interpretation of experimental results is confirmed by numerical 2D calculations of the split C-V characteristics by means of small signal ac analysis, and by numerical quasi-static analysis of the gate-capacitance components which originate from the different interface regions. The impact of the drain-source bias on the characteristics is explained. Applications are envisaged: measurements of technology parameters in VDMOSFETs, and separate measurement of the level of gate oxide degradation in the channel and in the epitaxial region after irradiation.
Starting Page	339
Ending Page	342
File Size	505498
Page Count	4
File Format	PDF
ISBN	0780352351
DOI	10.1109/ICMEL.2000.840584
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-05-14
Publisher Place	Yugoslavia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Capacitance-voltage characteristics Power measurement Capacitance measurement Charge carrier processes Signal analysis Pulse measurements Semiconductor process modeling MOS capacitors MOSFETs Stress measurement
Content Type	Text
Resource Type	Article

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