NDLI: Uncooled multi-band IR imaging using bimaterial cantilever FPA

Content Provider	IEEE Xplore Digital Library
Author	Wei Ma Shuyang Wang Yongzheng Wen Yuejin Zhao Liquan Dong Ming Liu Xiaohua Liu Xiaomei Yu
Copyright Year	2014
Description	Author affiliation: Sch. of Optoelectron., Inst. of Beijing Technol., Beijing, China (Yuejin Zhao; Liquan Dong; Ming Liu; Xiaohua Liu) \|\| Inst. of Microelectron., Peking Univ., Beijing, China (Wei Ma; Shuyang Wang; Yongzheng Wen; Xiaomei Yu)
Abstract	This paper presents the design, fabrication and performance of a 256×256 bimaterial cantilever focal plane array (FPA) which is able to work in the three infrared (IR) atmospheric windows of 1~2.5μm, 3~5μm and 8~14μm simultaneously. The FPA employs a silicon-framed structure by selectively etching away the substrate with Deep Reactive Ion Etching technique, and a stacked layer of chromium and $SiN_{x}$ serves as the multi-band absorber. The images of short wavelength, middle wavelength and long wavelength infrared were captured successfully with the same FPA by combining the Chromium nano-film with silicon nitride as the multi-band IR absorber. The measured sensitivity of the FPA is 0.18μm/K.
Sponsorship	IEEE Robot. Autom. Soc.
Starting Page	1225
Ending Page	1228
File Size	952660
Page Count	4
File Format	PDF
ISBN	9781479935093
DOI	10.1109/MEMSYS.2014.6765869
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-26
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Absorption Films Substrates Silicon Gold Mirrors Temperature sensors
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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