NDLI: Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator

Content Provider	IEEE Xplore Digital Library
Author	Fang Chen Weizheng Yuan Honglong Chang Zeimpekis, I. Kraft, M.
Copyright Year	2014
Description	Author affiliation: Key Lab. of Micro/Nano Syst. for Aerosp., Northwestern Polytech. Univ., Xi'an, China (Fang Chen; Weizheng Yuan; Honglong Chang) \|\| Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK (Zeimpekis, I.) \|\| Fac. of Eng. Sci., Univ. of Duisburg-Essen, Duisburg, Germany (Kraft, M.)
Abstract	This paper reports on the design, implementation of a novel sixth-order sigma-delta modulator (ΣΔM) MEMS closed-loop accelerometer with extended bandwidth in a vacuum environment (~0.5Torr), which can coexist on a single die (or package) with other sensors requiring vacuum packaging. The fully differential accelerometer sensing element with a large proof mass $(4×7mm^{2})$ was designed and fabricated on a Silicon-on-Insulator (SOI) wafer with 50μm-thick structural layer. Four electronic integrators were cascaded with the sensing element for high-order noise shaping ability. The local feedback paths created a local resonator producing a notch to further suppress the total in-band quantization noise. Measurement results show the overall noise floor achieved was -120dBg/√Hz, which is equivalent to a noise acceleration value of 1.2μg/√Hz in a 500Hz bandwidth; the scale factor was 950mV/g for input accelerations up to ±6g.
Sponsorship	IEEE Robot. Autom. Soc.
Starting Page	761
Ending Page	764
File Size	1047956
Page Count	4
File Format	PDF
ISBN	9781479935093
DOI	10.1109/MEMSYS.2014.6765752
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-26
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Sensors Micromechanical devices Noise Acceleration Gyroscopes Resonant frequency
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Precise Oscillation Loop for a Resonant Type MEMS Inertial Sensors

MASH2-0 electromechanical sigma-delta modulator for capacitive MEMS sensors using dual quantization method

Modeling and Simulation of High Performance Sixth Order Sigma-Delta MEMS Accelerometer

A high-resolution resonant MEMS accelerometer

Experimental study of single loop sigma-delta and multi stage noise shaping (MASH) modulators for MEMS accelerometer

System Design of Second-Order Sigma-Delta Micromachined Accelerometer

A simple low cost scheme for closed loop operation of MEMS capacitive accelerometer

Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer

Elimination of nonlinearity in sigma delta MEMS accelerometer

Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator

Similar Documents

Precise Oscillation Loop for a Resonant Type MEMS Inertial Sensors

MASH2-0 electromechanical sigma-delta modulator for capacitive MEMS sensors using dual quantization method

Modeling and Simulation of High Performance Sixth Order Sigma-Delta MEMS Accelerometer

A high-resolution resonant MEMS accelerometer

Experimental study of single loop sigma-delta and multi stage noise shaping (MASH) modulators for MEMS accelerometer

System Design of Second-Order Sigma-Delta Micromachined Accelerometer

A simple low cost scheme for closed loop operation of MEMS capacitive accelerometer

Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer

Elimination of nonlinearity in sigma delta MEMS accelerometer

Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator