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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Tsung-Lin Tang Rongshun Chen Weileun Fang |
| Copyright Year | 2011 |
| Description | Author affiliation: Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan (Tsung-Lin Tang; Rongshun Chen; Weileun Fang) |
| Abstract | This study demonstrates the magnetostatic torsional actuator consisting of a Si-Ni compound frame to significantly improve the driving force. The present design has three merits: (1) employ Si mold to simultaneously electroplate/pattern thick Ni, and the Ni and Si structures respectively provide magnetostatic force and superior mechanical properties, (2) the embedded Ni structures not only increase the ferromagnetic material volume but also enhance magnetization strength to enlarge magnetostatic torque, (3) the Si-Ni compound structure, which is nearly symmetric about the torsional axis, can decrease the moment of inertia and also reduce the wobble motion. Experiments show the Si-Ni compound scanner has optical scan angle θ=90°, and wobble motion and power consumption is significantly reduced. |
| Starting Page | 1249 |
| Ending Page | 1252 |
| File Size | 1658612 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424496327 |
| ISSN | 10846999 |
| e-ISBN | 9781424496341 |
| DOI | 10.1109/MEMSYS.2011.5734659 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2011-01-23 |
| Publisher Place | Mexico |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Nickel Silicon Actuators Compounds Magnetostatics Torque Magnetic materials |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
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