NDLI: High-aspect-ratio, 3-D micromachining of carbon-nanotube forests by micro-electro-discharge machining in air

Content Provider	IEEE Xplore Digital Library
Author	Dahmardeh, M. Khalid, W. Mohamed Ali, M.S. Choi, Y. Yaghoobi, P. Nojeh, A. Takahata, K.
Copyright Year	2011
Description	Author affiliation: Chalmers University of Technology, Gothenburg, Sweden (Khalid, W.) \|\| Jungwon University, Goesangun, Chungcheongbukdo, Korea (Choi, Y.) \|\| University of British Columbia, Vancouver, Canada (Dahmardeh, M.; Mohamed Ali, M.S.; Yaghoobi, P.; Nojeh, A.; Takahata, K.)
Abstract	This paper reports micro-electro-discharge machining of vertically aligned carbon nanotube forests for the formation of high-aspect-ratio, three-dimensional microstructures in the material. The developed forest machining method is a dry process performed in air, generating high-frequency pulses of electrical discharge to locally machine the nanotubes in order to create target shapes in a forest. With this approach, forest microstructures can be fabricated to have varying shapes along their height, unachievable with conventional pre-patterned chemical vapor deposition growth techniques. The use of the pulses with a minimized discharge energy defined with 35 V and 10 pF in the discharge generation circuit leads to an aspect ratio of 20 with the smallest feature of 5 µm in forests without disordering the vertical orientation of the nanotubes. Micromachining of multilayer geometries as well as arrayed needle-like microstructures with angled surfaces is demonstrated.
Starting Page	272
Ending Page	275
File Size	2932738
Page Count	4
File Format	PDF
ISBN	9781424496327
ISSN	10846999
e-ISBN	9781424496341
DOI	10.1109/MEMSYS.2011.5734414
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-01-23
Publisher Place	Mexico
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Machining Electrodes Discharges Carbon nanotubes Microstructure Micromechanical devices Voltage measurement
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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