NDLI: Pull-in time dynamics as a measure of absolute pressure

Content Provider	IEEE Xplore Digital Library
Author	Gupta, R.K. Senturia, S.D.
Copyright Year	1997
Description	Author affiliation: Microsyst. Technol. Lab., MIT, Cambridge, MA, USA (Gupta, R.K.)
Abstract	The squeezed-film damping component of the pull-in time of an electrostatically-actuated micromechanical fixed-fixed beam is shown to be a sensitive, and nearly linear function of ambient air pressure in the measured range of 0.1 mbar to 1013 mbar (1 atm or 760 Torr). Pull-in time simulations, based on a one-dimensional macromodel using a damping constant proportional to pressure, are in good agreement with measured data. The data and simulations show that pull-in type devices will make excellent microelectromechanical systems (MEMS) sensors for broad-range absolute pressure measurements and for in situ leak monitoring of hermetically scaled packages containing other sensors or IC's. The pull-in sensors are compatible with any MEMS fabrication processes that allow out-of-plane electrostatic actuation, including surface micromachining and silicon wafer-bonding, and they do not require a cavity sealed at vacuum or at a reference air pressure.
Starting Page	290
Ending Page	294
File Size	495309
Page Count	5
File Format	PDF
ISBN	0780337441
ISSN	10846999
DOI	10.1109/MEMSYS.1997.581830
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-01-26
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Pressure measurement Time measurement Micromechanical devices Electrostatic measurements Damping Sensor systems Microelectromechanical systems Monitoring Hermetic seals Packaging
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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