NDLI: Flexible microgripper and its application to micromeasurement of mechanical and thermal properties

Content Provider	IEEE Xplore Digital Library
Author	Suzuki, Y.
Copyright Year	1996
Description	Author affiliation: Res. Lab., Nikon Corp., Tokyo, Japan (Suzuki, Y.)
Abstract	Two novel micro-measurement systems using microfabricated flexible microgrippers (FMG) are presented. One system is a micro-measurement system for mechanical properties of a gripped micro-object under the microscope. In this system, the gripping force can be calculated from the elasticity of the microfinger and the driving voltage of FMG. By using this FMG-measurement system, the surface force of the cell membrane of sea urchin egg under seawater has been determined successfully from the measured deformation of the egg and the calculated gripping force of FMG. The other system is a micro-measurement system for thermal properties of micro-objects. For this system, a new microgripper with an integrated micro-thermocouple (TC-FMG) is proposed. By using micromachining, a new microfinger which has a thin film micro-thermocouple on the finger end has been developed and fabricated. The fabrication process and characterization results are discussed. By using a microfinger of TC-FMG with small heat capacity, the temperature change of a thermally actuated microfinger of standard FMG has been measured successfully. Using the measured temperature and temperature dependency of the resistivity of the microcoil, the in-air performance of the standard FMG could be written in the form of an equation which includes the resistivity change for various driving voltages.
Starting Page	406
Ending Page	411
File Size	1001716
Page Count	6
File Format	PDF
ISBN	0780329856
DOI	10.1109/MEMSYS.1996.494016
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-02-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Grippers Ocean temperature Force measurement Sea measurements Temperature measurement Voltage Measurement standards Temperature dependence Conductivity Mechanical factors
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in