NDLI: Micromachined polymer magnets

Content Provider	IEEE Xplore Digital Library
Author	Lagorce, L.K. Allen, M.G.
Copyright Year	1996
Description	Author affiliation: Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA (Lagorce, L.K.; Allen, M.G.)
Abstract	Micromachinable magnetic polymer composites have been prepared using commercial polyimide (Dupont PI-2555), and ferrite magnetic powders with different concentration levels (85-95 wt%). Magnetic, processability, and mechanical properties of these composites were measured. The B-H curve was measured using a vibrating sample magnetometer and showed typical permanent magnet behavior, with coercivity of 4000 Oe and residual induction approaching 3000 Gauss. In order to demonstrate the application of this material to micromachining, a simple permanent magnet microactuator has been fabricated. This actuator consists of a surface micromachined polyimide platform flexibly supported by tether arms. The composite material is deposited on the platform using screen printing. A 20 turn circular coil is integrated under the platform to complete the integrated microactuator. When driving the coil with 300 mA DC current, deflections of the platform in the range of +/-30 /spl mu/m have been achieved. By reversing the direction of the current, both attraction and repulsion of the actuator occurred which confirms the permanent magnet character of the material.
Starting Page	85
Ending Page	90
File Size	676970
Page Count	6
File Format	PDF
ISBN	0780329856
DOI	10.1109/MEMSYS.1996.493834
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-02-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Polymers Magnetic materials Permanent magnets Polyimides Microactuators Actuators Coils Ferrites Powders Mechanical factors
Content Type	Text
Resource Type	Article

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