NDLI: Structure properties of GaN/sub 1-x/P/sub x/ ternary alloys grown by metal-organic chemical vapor deposition

Content Provider	IEEE Xplore Digital Library
Author	Chen, D.J. Shen, B. Xu, F.J. Tao, Y.Q. Zhang, R. Shi, Y. Zheng, Y.D.
Copyright Year	2004
Description	Author affiliation: Jiangsu Provincial Key Lab. of Photonic & Electron. Mater. Sci. & Technol., Nanjing Univ., China (Chen, D.J.; Shen, B.; Xu, F.J.; Tao, Y.Q.; Zhang, R.; Shi, Y.; Zheng, Y.D.)
Abstract	GaN-rich side of GaN/sub 1-x/P/sub x/ ternary alloys have been successfully synthesized by light-radiation heating and low-pressure metal-organic chemical vapor deposition. The Ga 3d and P 2p core level peaks of the GaN/sub 1-x/P/sub x/ films show that P atoms in GaN/sub 1-x/P/sub x/ do partly occupy the N site but also is incorporated as interstitials of GaN/sub 1-x/P/sub x/ by means of X-ray photoelectron spectroscopy. X-ray diffraction spectra show that the (0002) peak of GaN/sub 1-x/P/sub x/ shifts to smaller angle with increasing P composition and the GaN/sub 1-x/P/sub x/ films are still of a typical hexagonal structure. The Raman spectra of GaN/sub 1-x/P/sub x/ films, recorded in backscattering geometry, exhibit four new vibrational modes at 256, 314, 377 and 428 cm/sup -1/ compared with an undoped GaN sample. Those modes are assigned to the so called quasi-local mode induced by P in GaN, disorder-activated scattering and gap modes related to the Ga-P bond vibrations, respectively.
Sponsorship	Chinese Inst. of Electron. Japan Soc. of Appl. Phys./Silicon Technol. Div
Starting Page	206
Ending Page	209
File Size	199329
Page Count	4
File Format	PDF
ISBN	0780381912
DOI	10.1109/IWJT.2004.1306795
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-03-16
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	IEEE, NJ
Subject Keyword	Gallium nitride Heating Chemical vapor deposition Atomic layer deposition Spectroscopy X-ray diffraction Backscatter Geometry Raman scattering Light scattering
Content Type	Text
Resource Type	Article

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