NDLI: Photoelectric methods of potential barrier heights determination in the MOS structure

Content Provider	IEEE Xplore Digital Library
Author	Kudla, A. Brzezinska, D.
Copyright Year	1999
Description	Author affiliation: Inst. of Electron Technol., Warsaw, Poland (Kudla, A.)
Abstract	Considerable differences between the values of Al-SiO/sub 2/-Si structure barrier heights reported in the literature may be at least partly explained by the imperfections of the measurement methods and the lack of a sufficiently accurate method of the verification of the obtained results. The most accurate, photoelectric method of contact potential difference determination is proposed in this paper to assess the accuracy of barrier height extraction. The disadvantages of the Powell method are demonstrated. It is shown that the interference phenomena have to be taken into account in the Fowler method. An improved model of the interference in a Al-SiO/sub 2/-Si structure is proposed with the interface layers, porosity, and surface oxidation of the aluminium layer taken into account. A simple, direct method of barrier height determination is proposed, too. The best agreement between the barrier heights determined by the photoelectric method and other methods was reached in the case of the Fowler method. A dependence of the Si-to-SiO/sub 2/ photoemission barrier height on the thickness of the aluminium gate has been observed, while no such dependence has been observed in the case of Al-to-Si photoemission.
Starting Page	1934
Ending Page	1937
File Size	323313
Page Count	4
File Format	PDF
ISBN	0780352769
ISSN	10915281
DOI	10.1109/IMTC.1999.776157
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-05-24
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Photoelectricity Dielectric measurements Electrons Photoconductivity Voltage Interference Aluminum Electrodes Dielectric substrates Dielectrics and electrical insulation
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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