NDLI: Zero temperature coefficient characteristic of four-corner-truncated square quartz resonator supported at four nodal points in Lamé mode

Content Provider	IEEE Xplore Digital Library
Author	Kanie, H. Todo, Y. Hirota, Y. Furukawa, M. Ueno, T. Tadamatsu, K.
Copyright Year	2010
Description	Author affiliation: Applied Electronics, Tokyo Univ. of Science, Noda, Japan (Kanie, H.; Todo, Y.; Hirota, Y.; Furukawa, M.; Ueno, T.; Tadamatsu, K.)
Abstract	This paper describes analytical and experimental study of a zero-temperature-coefficient square Lamé-mode quartz resonator supported at four nodal points. Comparison of vibration mode shapes of the resonators with and without four supporting beams in the modal analysis using finite element analysis indicated that several contour modes vibrating at large amplitude in the corners with frequency lower than that of the Lamé mode get a boost in frequency by the constraint at the corners and resulted in spurious modes to the Lamé mode by temperature shift. Comparison of mode shapes of these unwanted contour vibrating modes with and without truncation at the corners of the square quartz plate indicated another boost in frequency caused by the reduction in mass where the mode vibrates at large amplitude. Four-corner truncated square quartz resonators supported by four beams were designed and fabricated by wet etching process. Measured data of the fabricated resonators made of LQ1T and LQ2T cut quartz plates indicated a zero temperature coefficient and electrical equivalent circuit parameters comparable to those of a fundamental mode Lamé resonators with two point support.
Starting Page	52
Ending Page	55
File Size	361469
Page Count	4
File Format	PDF
ISBN	9781424463992
ISSN	10756787
e-ISBN	9781424464012
DOI	10.1109/FREQ.2010.5556376
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonant frequency Temperature measurement Frequency measurement Temperature Shape Etching TV
Content Type	Text
Resource Type	Article

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