NDLI: Nickel Vibrating Micromechanical Disk Resonator with Solid Dielectric Capacitive-Transducer Gap

Content Provider	IEEE Xplore Digital Library
Author	Wen-Lung Huang Zeying Ren Nguyen, C.T.-C.
Copyright Year	2006
Description	Author affiliation: Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI (Wen-Lung Huang; Zeying Ren; Nguyen, C.T.-C.)
Abstract	A MEMS-based vibrating disk resonator fabricated in a low temperature nickel metal material and using a 30-nm nitride dielectric capacitive transducer has been demonstrated at frequencies approaching 60 MHz with Q's as high as 54,507, which is the highest to date for any micro-scale metal resonator in the VHF range. The frequency-Q product of $3.3times10^{12}$ achieved by this device is three orders of magnitude higher than the $1.1times10^{9}$ of previous nickel micromechanical resonators. The degree of isolation afforded by its supports strongly governs the achievable Q's of this device, which vary from 490 when a 2 mum-radius supporting stem is used, to 54,507 when no stem is used, clearly indicating an anchor dominated loss mechanism, but more importantly indicating that nickel's intrinsic material Q is quite high at VHF. Furthermore, because its highest process temperature is 380degC, and there are paths to an even lower temperature ceiling (e.g., 100degC), the fabrication process for nickel disks is amenable to post-processing over finished foundry CMOS wafers, even those using advanced low-k dielectrics around copper metallization. Nickel material thus presents an intriguing path towards a complete communication transceiver (including all high Q passives) on a chip
Starting Page	839
Ending Page	847
File Size	1636454
Page Count	9
File Format	PDF
ISBN	1424400740
DOI	10.1109/FREQ.2006.275499
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-06-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nickel Micromechanical devices Solids Dielectric materials Frequency Temperature distribution Inorganic materials Transducers Fabrication Foundries integration MEMS micromechanical resonator nickel capacitive transducer quality factor charge bias
Content Type	Text
Resource Type	Article

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