NDLI: Design of Rayleigh SAW Resonators for Applications as Gas Sensors in Highly Reactive Chemical Environments

Content Provider	IEEE Xplore Digital Library
Author	Avramov, I.D.
Copyright Year	2006
Description	Author affiliation: Inst. of Solid State Phys., Sofia (Avramov, I.D.)
Abstract	This work presents the performance and important design considerations of the first successful highly efficient Rayleigh surface acoustic wave (RSAW) resonator filters using gold (Au) electrode structure. Au metallisation provides corrosion immunity when the devices are operated as polymer coated gas sensors in chemically reactive environments. It is shown that Au, due to its 7 times higher density than Al, provides about 13 times higher frequency sensitivity and a stronger velocity perturbation in resonant devices compared to their RSAW counterparts with aluminium (Al) electrodes. This results in strong excitation of unwanted surface skimming bulk wave (SSBW) modes and transverse wave guide modes (TWGMs) in such resonant Au devices. Practical guidelines for the choice of correct device geometry, Au thickness and spacer variations to maximize coupling to the desired RSAW mode, increase resonator efficiency and loaded Q, as well as minimize interference with parasitic TWGMs are given. Experimental 433 MHz two-port resonators and dual mode inline coupled filters with insertion loss in the -8 to -12 dB range and loaded Q values in the 4500 to 6000 range are presented with emphasis on their polymer coating and gas probing behavior
Starting Page	381
Ending Page	388
File Size	447294
Page Count	8
File Format	PDF
ISBN	1424400740
DOI	10.1109/FREQ.2006.275415
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-06-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface acoustic waves Gas detectors Chemical sensors Gold Resonator filters Electrodes Polymer films Resonance Surface acoustic wave devices Acoustic waves transverse waveguide modes Rayleigh SAW resonators sensors gold electrodes film thickness SSBW modes
Content Type	Text
Resource Type	Article

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