NDLI: Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps

Content Provider	IEEE Xplore Digital Library
Author	Yu-Wei Lin Sheng-Shian Li Yuan Xie Zeying Ren Nguyen, C.T.C.
Copyright Year	2005
Description	Author affiliation: Center for Wireless Integrated Micro Syst., Michigan Univ. (Yu-Wei Lin; Sheng-Shian Li; Yuan Xie; Zeying Ren; Nguyen, C.T.C.)
Abstract	VHF and UHF MEMS-based vibrating micromechanical resonators equipped with new solid dielectric (i.e., filled) capacitive transducer gaps to replace previously used air gaps have been demonstrated at 160 MHz, with Q's ~ 20,200 on par with those of air-gap resonators, and motional resistances $(R_{x}'s)$ more than 8times smaller at similar frequencies and bias conditions. This degree of motional resistance reduction comes about via not only the higher dielectric constant provided by a solid-filled electrode-to-resonator gap, but also by the ability to achieve smaller solid gaps than air gaps. These advantages with the right dielectric material may now allow capacitively-transduced resonators to match to the 50-377 Omega impedances expected by off-chip components (e.g., antennas) in many wireless applications without the need for high voltages. In addition to lower motional resistance, the use of filled-dielectric transducer gaps provides numerous other benefits over the air gap variety, since it (a) better stabilizes the resonator structure against shock and microphonics; (b) eliminates the possibility of particles getting into an electrode-to-resonator air gap, which poses a potential reliability issue; (c) greatly improves fabrication yield, by eliminating the difficult sacrificial release step needed for air gap devices; and (d) potentially allows larger micromechanical circuits (e.g., bandpass filters comprised of interlinked resonators) by stabilizing constituent resonators as the circuits they comprise grow in complexity
Starting Page	128
Ending Page	134
File Size	613544
Page Count	7
File Format	PDF
ISBN	0780390539
DOI	10.1109/FREQ.2005.1573914
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-08-29
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Solids Transducers Air gaps Circuits Frequency High-K gate dielectrics Dielectric materials Impedance Dielectric resonator antennas
Content Type	Text
Resource Type	Article

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