NDLI: A novel positioning stage with resolution enhancement functionality for nano manipulation

Content Provider	IEEE Xplore Digital Library
Author	Chong Du Weihai Chen Xiantao Sun Yunjie Wu Jianbin Zhang Wenjie Chen
Copyright Year	2013
Description	Author affiliation: Sch. of Mech. Eng. & Autom., Beihang Univ., Beijing, China (Jianbin Zhang) \|\| Mechatron. Group, Singapore Inst. of Manuf. Technol., Singapore, Singapore (Wenjie Chen) \|\| Sch. of Autom. Sci. & Electr. Eng., Beihang Univ., Beijing, China (Chong Du; Weihai Chen; Xiantao Sun; Yunjie Wu)
Abstract	With the rapid development of nano science and precision engineering, a positioning system with high resolution is indispensable to meet the requirement of precise positioning. This paper presents the design and modeling of a flexure-based positioning stage with the functionality of resolution enhancement. To achieve high enhancement ratio, two sets of displacement reduction mechanisms are incorporated and configured serially in a monolithic symmetrical design. Following the assumption that the flexure hinge can be equivalent to an ideal revolute joint with a torsional spring, theoretical models are established to analyze the resolution enhancement ratio and dynamic performance of the positioning stage. Moreover, finite element analysis (FEA) is conducted to study the performances of the mechanism and verify the theoretical models. The results show that the proposed mechanism can achieve a resolution enhancement ratio of 18.75 to improve the positioning performance, and the first order natural frequency of the mechanism is 535.5Hz, which guarantees the bandwidth of the positioning operation.
Sponsorship	IEEE Nanotechnol. Counc.
Starting Page	170
Ending Page	175
File Size	716012
Page Count	6
File Format	PDF
e-ISBN	9781479912131
DOI	10.1109/3M-NANO.2013.6737407
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-08-26
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Decision support systems Integrated circuits Three-dimensional displays Resolution enhancement Precision engineering Bandwidth Fasteners Precision positioning Finite element analysis Dynamic model Flexure hinge
Content Type	Text
Resource Type	Article

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