NDLI: Design and research of miniaturization two-dimensional micro-positioning platform based on parallel sheet plate flexible decoupling beams

Content Provider	IEEE Xplore Digital Library
Author	Chen Li-guo Lei Yan-yan Chen Tao Pan Ming-qiang Gu Yang-qin
Copyright Year	2013
Description	Author affiliation: Robot. & Microsyst. Centre, Soochow Univ. Suzhou, Suzhou, China (Chen Li-guo; Lei Yan-yan; Chen Tao; Pan Ming-qiang; Gu Yang-qin)
Abstract	High precision positioning stage has played increasingly important role in the areas of aeronautics and astronautics, ultra-precision manufacturing and measuring, microelectronics, biological engineering, optical engineering, etc. In this paper, a piezo-powered 2D micro-positioning stage based on parallel sheet plate flexible beams is designed. A lever amplifier structure connected by circular arc flexible hinges is designed, which can effectively enlarge driven displacement and narrow the size of the positioning stage. The structure of parallel flexible decoupling beams and circular arc flexure hinges are simulated by ANSYS. The simulation results show that the structure of the stage can effectively reduce the coupling of the micro positioning stage. Finally, the stage is manufactured and the experiments proved that the positioning accuracy is 10nm and the coupling of the micro positioning platform is 5.036%.
Sponsorship	IEEE Nanotechnol. Counc.
Starting Page	86
Ending Page	91
File Size	242960
Page Count	6
File Format	PDF
e-ISBN	9781479912131
DOI	10.1109/3M-NANO.2013.6737389
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-08-26
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Couplings Analytical models Torque Decoupling Flexible hinge Flexible beams Force MEMS capacitive sensor Materials Micro-positioning stage Fasteners Finite element analysis
Content Type	Text
Resource Type	Article

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