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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Hoppener, Roderik van Olmen, Ronald De Moya, Martin Stupar, Joze |
| Copyright Year | 2012 |
| Description | Author affiliation: Haikutech Inc., Miami Fl 33130, USA (De Moya, Martin) || Keko Equipment, Ltd., 6180 Žužemberk, Slovenia (Stupar, Joze) || Haikutech Europe BV, 6274 NN Reijmerstok, The Netherlands (Hoppener, Roderik; van Olmen, Ronald) |
| Abstract | An overview of the state of the art LTCC process, technology and its applications will be presented. LTCC integrated electronic circuit technology is currently developing rapidly into new areas. Well known for its robustness and suitability for high frequency circuits, LTCC is now developing into new applications such as MEMS sensors and actuators. New possibilities are created by 3D fluidic integration for sensors and micro reactors. With ever increasing requirements for miniaturisation, optimized processing methods have been developed. The new LTCC processing methods enable higher accuracies of the produced parts while facilitating the incorporation of 3D channels in production environments. The higher accuracy methods however also put constraints on the properties of the materials used making it necessary to choose the correct process and material for its application. |
| Starting Page | 1 |
| Ending Page | 1 |
| File Size | 43532 |
| Page Count | 1 |
| File Format | |
| ISBN | 9781467310406 |
| e-ISBN | 9781467310437 |
| DOI | 10.1109/ISPTS.2012.6260966 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-03-07 |
| Publisher Place | India |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromechanical devices Technological innovation Accuracy Materials Sensors Manufacturing Physics |
| Content Type | Text |
| Resource Type | Article |
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