NDLI: Miniaturization of LTCC based hot plates for gas sensors application

Content Provider	IEEE Xplore Digital Library
Author	Patel, Chandrakant Jadhav, Adwaita Lone, Sudhir Rane, Vivek Chaware, Varsha Giramkar, Vijaya Phatak, Girish
Copyright Year	2012
Description	Author affiliation: Electronic Packaging Division, Centre for Materials for Electronics Technology (C-MET) Panchwati, Off Pashan Road, Pune - 411008, India (Patel, Chandrakant; Jadhav, Adwaita; Lone, Sudhir; Rane, Vivek; Chaware, Varsha; Giramkar, Vijaya; Phatak, Girish)
Abstract	Low Temperature Co-fired Ceramic (LTCC) is amongst the favoured technologies for preparing miniature integrated packages and devices for various sensor and actuators applications. It is known that semiconductor gas sensors work at elevated temperatures. We have developed LTCC based micro hotplates with integrated temperature sensors for preparing miniature gas sensors. We have devised way to fabricate small size (Long side 6.5mm) suspended hot plate design of LTCC based hotplate with integrated thermistor. This paper presents results of heater and thermistor characterization for solid rectangular block and suspended hotplate designs of the hot plate. It is seen that the heaters as well as the thermistors present a linear behavior for both the designs. The rectangular solid block design dissipates about 3.5W power while the suspended hot plate design requires only about 144mW reaching steady state temperature of 250°C.
Starting Page	83
Ending Page	86
File Size	1285217
Page Count	4
File Format	PDF
ISBN	9781467310406
e-ISBN	9781467310437
DOI	10.1109/ISPTS.2012.6260886
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-03-07
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature sensors Temperature distribution Suspended hot plate Integrated heater Heating Integrated Thermistor Thermistors Solids LTCC Gas sensors Gas detectors Hot plate
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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