NDLI: Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes

Content Provider	IEEE Xplore Digital Library
Author	Ming-Huang Li Chao-Yu Chen Cheng-Syun Li Chi-Hang Chin Sheng-Shian Li
Copyright Year	2013
Description	Author affiliation: Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan (Ming-Huang Li; Chao-Yu Chen; Cheng-Syun Li; Chi-Hang Chin; Sheng-Shian Li)
Abstract	A novel CMOS-MEMS composite ring resonator capable of a dual-mode operation has been proposed to enable self-temperature sensing in a single device. To maximize the temperature sensitivity between the dual modes, two resonant modes of a single resonator vibrating in orthogonal axes (i.e., inplane and out-of-plane) are chosen due to the large difference of their temperature coefficients of frequency (TCf's). By adjusting the constituent ratio and the position of metals and dielectrics through CAD layouts, different TCf's have been successfully demonstrated in a single CMOS-MEMS resonator. By measuring the TCf's of the in-plane (INP) and out-of-plane (OOP) mode concurrently, a beat frequency with a temperature coefficient of 72 ppm/°C was characterized. By employing a divider-based scaling concept, an estimated maximum beat frequency sensitivity of 3,244 ppm/°C can be obtained under proper scaling numbers.
Sponsorship	IEEE Ultrason., Ferroelectr., Freq. Control Soc.
Starting Page	539
Ending Page	542
File Size	1942206
Page Count	4
File Format	PDF
DOI	10.1109/EFTF-IFC.2013.6702251
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-07-21
Publisher Place	Czech Republic
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature sensors Electrodes Sensitivity Beat frequency Resonant frequency Optical resonators Dual-mode Frequency measurement CMOS-MEMS Resonators Indium phosphide Back-end of line (BEOL)
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy

Suppression of spurious modes via dummy electrodes and 2% frequency shift via cavity size selection for 1 GHz AlN MEMS contour-mode resonators

CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance

RF MEMS resonator for CMOS back-end-of-line integration

Fully differential CMOS-MEMS square-plate oxide resonators with embedded poly-silicon electrodes

Multimode characteristics of high-frequency CMOS-MEMS resonators

Indium phosphide MEMS for integrated bio-sensing

A 586 MHz microcontroller compensated MEMS oscillator based on ovenized aluminum nitride contour-mode resonators

Dual-Mode AlN-on-Silicon Micromechanical Resonators for Temperature Sensing

Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes

Similar Documents

Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy

Suppression of spurious modes via dummy electrodes and 2% frequency shift via cavity size selection for 1 GHz AlN MEMS contour-mode resonators

CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance

RF MEMS resonator for CMOS back-end-of-line integration

Fully differential CMOS-MEMS square-plate oxide resonators with embedded poly-silicon electrodes

Multimode characteristics of high-frequency CMOS-MEMS resonators

Indium phosphide MEMS for integrated bio-sensing

A 586 MHz microcontroller compensated MEMS oscillator based on ovenized aluminum nitride contour-mode resonators

Dual-Mode AlN-on-Silicon Micromechanical Resonators for Temperature Sensing

Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes