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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yan Shen Qing Liu Zhiyuan Zuo Mingsheng Xu Huan Liu Ying Wang Xiangang Xu Kai Jiang Muqing Zhang Xiaobo Hu |
| Copyright Year | 2013 |
| Description | Author affiliation: State Key Lab. of Crystal Mater., Shandong Univ., Jinan, China (Yan Shen; Mingsheng Xu; Xiangang Xu; Xiaobo Hu) || Shandong Huaguang Optoelectron. Co., Ltd., Jinan, China (Qing Liu; Zhiyuan Zuo; Huan Liu; Ying Wang; Kai Jiang; Muqing Zhang) |
| Abstract | The ITO film as the transparent conductive layer in gallium nitride based light emitting diodes (LEDs) can improve effectively current spreading and is widely applied. In this paper, ITO films with different morphologies have been obtained through different evaporation conditions. By adjusting oxygen flow in the process of evaporation, nanorod, cellular particle and grain cluster ITO structures had been obtained. Roughnesses of different ITO films were detected by AFM and the optical properties are analyzed by ultraviolet-visual spectrometer. The growth mechanisms of ITO films with different surface morphologies are also discussed. |
| Starting Page | 219 |
| Ending Page | 222 |
| File Size | 699199 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479922499 |
| e-ISBN | 9781479922505 |
| DOI | 10.1109/SSLCHINA.2013.7177352 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-11-10 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Indium tin oxide Surface morphology Morphology Surface roughness Rough surfaces Optical films |
| Content Type | Text |
| Resource Type | Article |
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