NDLI: Annealing temperature effect on the electrical characteristics and pH sensitivity of TiO2/ZnO bilayer films

Content Provider	IEEE Xplore Digital Library
Author	Rahman, R.A. Zulkefle, M.A. Rusop, M. Abdullah, W.F.H. Herman, S.H.
Copyright Year	2015
Description	Author affiliation: NANO-Electron. Centre, Univ. Teknol. MARA, Shah Alam, Malaysia (Rahman, R.A.; Zulkefle, M.A.; Rusop, M.; Herman, S.H.) \|\| Fac. of Electr. Eng., Univ. Teknol. MARA, Shah Alam, Malaysia (Abdullah, W.F.H.)
Abstract	The effect of annealing temperature on the surface morphology and electrical properties of composite bilayer, $TiO_{2}/ZnO$ were studied in this investigation. The composite thin films were applied as the sensing membrane of an Extended Gate Field-Effect Transistor (EGFET) based pH sensor. $TiO_{2}$ and ZnO were deposited on Indium Tin Oxide (ITO) by using sol-gel spin-coating process. The effects of the varied parameter on the sensor sensitivity and linearity were also investigated. The sensitivity of the $TiO_{2}$ thin film towards pH buffer solution was measured by dipping the sensing membrane in pH4, pH7 and pH10 buffer solution. In addition, these thin films were characterized by using Field Emission Scanning Electron Microscope (FESEM) to obtain the surface morphology of the composite thin films. Meanwhile, I-V measurement was done in order to determine the electrical properties of the thin films. According to the result obtained in this experiment, thin film that annealed at highest temperature, which is 500°C produced highest sensitivity, 53.3 mV/pH. Relating the I-V characteristic of the thin films and sensitivity, the sensing membrane with higher conductivity gave better sensitivity.
Starting Page	39
Ending Page	43
File Size	3434674
Page Count	5
File Format	PDF
e-ISBN	9781479917235
DOI	10.1109/ISTMET.2015.7358997
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-08-25
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature measurement Temperature sensors Annealing temperature effect Annealing Sensitivity Films EGFET pH sensor TiO2/ZnO bilayer Conductivity Zinc oxide
Content Type	Text
Resource Type	Article

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