NDLI: Sensing capability of TiO2 thin films with different thicknesses as sensing membrane of EGFET pH sensor

Content Provider	IEEE Xplore Digital Library
Author	Zulkefle, M.A. Abdul Rahman, R. Rusop Mahmood, M. Abdullah, W.F.H. Herman, S.H.
Copyright Year	2015
Description	Author affiliation: Fac. of Electr. Eng., Univ. Teknol. MARA, Shah Alam, Malaysia (Zulkefle, M.A.; Abdul Rahman, R.; Rusop Mahmood, M.; Abdullah, W.F.H.; Herman, S.H.)
Abstract	For this research, titanium dioxide $(TiO_{2})$ is used as the sensing membrane and the thickness of the sensing membrane is varied to study the influence of thickness of sensing membrane towards EGFET pH sensor sensitivity. $TiO_{2}$ sensing membrane in form of thin film was deposited on an indium tin oxide (ITO) substrate where sol-gel spin coating technique was chosen as the depositing technique. Result shows that increasing thickness will increase the thin film surface roughness. All samples have linearity approximately 1 which indicates that $TiO_{2}$ is suitable and stable to be used to detect hydrogen ion in solution with different pH values. The sample sensitivity was measured and the result shows that the thinnest sample has the highest sensitivity with value of 56 mV/pH. This value is close to Nernstian theoretical value of 59 mV/pH.
Starting Page	30
Ending Page	33
File Size	706022
Page Count	4
File Format	PDF
e-ISBN	9781479917235
DOI	10.1109/ISTMET.2015.7358995
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-08-25
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface morphology Surface roughness Rough surfaces Sol-gel spin coating Thickness Sensitivity Linearity Titanium Sensing membrane Sensors Titanium dioxide PH sensor EGFET
Content Type	Text
Resource Type	Article

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