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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jun-Bo Yoon |
| Copyright Year | 2015 |
| Description | Author affiliation: Sch. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea (Jun-Bo Yoon) |
| Abstract | Since a microelectromechanical (MEM) switch with an electrostatically actuated cantilever was first demonstrated by Petersen in 1978 [1], MEM switches and nanoelectromechanical (NEM) switches have actively been researched so far by many research groups. This is because they are considered as one of the ideal switching devices, thanks to their ideal zero leakage characteristic, nearly infinite sub-threshold slope, large On/Off current ratio, low power consumption, and immunity to harsh environments. Now, we are dreaming of a NEM IC in the future (Fig. 1). In this talk, we look at what lies behind these difficulties in MEM switches first. Then, we study what kind of bright ideas have been investigated to enhance the actuation voltage and switch endurance (lifetime) problems, respectively. Especially, we bring an idea that in order to increase the lifetime, an electromechanical contact is the most important part that we should pay attention to and that is the area where multi-dimensional disciplines are required. Some of the previous structural, material-wise, and nanotechnology-based approaches to enhance the lifetime are presented and discussed, from which we unveil the lessons learned. |
| Starting Page | 1 |
| Ending Page | 1 |
| File Size | 1939079 |
| Page Count | 1 |
| File Format | |
| ISBN | 9781467385688 |
| DOI | 10.1109/E3S.2015.7336787 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-10-01 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Integrated circuits Electrical engineering Power demand Contacts Switches Electronic mail Transistors |
| Content Type | Text |
| Resource Type | Article |
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