NDLI: Observations and analysis of extreme ultraviolet emission by capillary discharge with Xe as target

Content Provider	IEEE Xplore Digital Library
Author	Xu Qiang Zhao Yong-peng Guan Zhi-liang Zhang Ye Wang Qi Li Qi
Copyright Year	2010
Description	Author affiliation: National Key Laboratory of Science and Technology on Tunable laser, Harbin Institute of Technology, Harbin 150080, China (Xu Qiang; Zhao Yong-peng; Guan Zhi-liang; Zhang Ye; Wang Qi; Li Qi)
Abstract	The first capillary discharge produced plasma extreme ultraviolet source has been started in China. Fundamental characteristics of DPP including current, Xe gas pressure, extreme ultraviolet energy and spectrum in extreme ultraviolet region have been studied. A high voltage power source is employed, which voltage can be changed from 20kV to 30kV, and the current is from 25kA to 45kA with a FWHM of 120ns. The high voltage is loaded between the capillary which is 3mm in diameter and 12mm in length by injected Xe gas to achieve extreme ultraviolet radiation mostly in the region 10nm∼18nm developed in framework of an extreme ultraviolet lithograph program. It is founded that the in-band (13.5nm, 2% bandwidth) energy is increasing with decreasing Xe gas pressure and/or increasing the current in the region 5∼10Pa and 25kA∼45kA. And 0.56J/2π sr/pulse energy (13.5nm, 2% bandwidth) can be got when the input energy is 47.7J, and the conversion efficiency is 0.56%.
Starting Page	213
Ending Page	216
File Size	692925
Page Count	4
File Format	PDF
ISBN	9781424455119
e-ISBN	9781424455133
DOI	10.1109/RCSLPLT.2010.5615265
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-07-28
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ultraviolet sources EUV source Discharges Xenon Bandwidth 13.5nm Emission Fault location Extreme ultravilet lithograph Capillary Discharge Plasmas Xe discharge
Content Type	Text
Resource Type	Article

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