NDLI: Structure variation and annealing effect on mechanical properties of single carbon films

Content Provider	IEEE Xplore Digital Library
Author	Lai, C.W. Wu, B.H. Hung, S.T. Chung, C.K.
Copyright Year	2009
Description	Author affiliation: Dep't of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan, ROC (Lai, C.W.; Hung, S.T.; Chung, C.K.) \|\| Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan, ROC (Wu, B.H.)
Abstract	The aim of this study is to investigate the effect of thickness variation, rapid thermal annealing and silicon layer addition on mechanical property of single carbon film by using nanoindentation. From the results, Raman spectra showed that ID/IG ratio decreased with increasing carbon film thickness on single-layer structure at room temperature (RT). The higher the ID/IG, the more the $sp^{2}$ bonds are. The evolution of both hardness and Young's modulus of films had the inverse trend as the formation of $sp^{2}$ bond. Therefore, it is noted that less $sp^{2}$ bond formation was beneficial to enhance the hardness and Young's modulus of single carbon layer structure. Compared with single-layer structure, hardness and Young's modulus of C/Si two-layer decreased through Si addition. Under thermal treatment process, it can be found that hardness and Young's modulus decreased at 750 °C due to graphitization then the SiC was formed at higher annealing temperature on the surface of two-layer structure lead to hardness enhancement.
Starting Page	197
Ending Page	200
File Size	1304329
Page Count	4
File Format	PDF
ISBN	9781424455287
e-ISBN	9781424455300
DOI	10.1109/NANOMED.2009.5559086
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-10-18
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Annealing Silicon carbide Films Ion beam sputtering Mechanical property Silicon Bonding Carbon
Content Type	Text
Resource Type	Article

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