NDLI: Nonlinear robust stage control of atomic force microscope

Content Provider	IEEE Xplore Digital Library
Author	Nakakuki, T. Ogawa, M. Ishii, C.
Copyright Year	2012
Description	Author affiliation: Department of Mechanical Systems Engineering, Kogakuin University, 1-24-2 NishiShinjuku, Shinjuku-ku, Tokyo 163-8677 JAPAN (Nakakuki, T.) \|\| Department of Mechanical Engineering, Hosei University, 3-7-2 Kajino-cho, Koganei-shi, Tokyo 184-8584 JAPAN (Ishii, C.) \|\| Mechanical Engineering, Kogakuin University, 1-24-2 NishiShinjuku, Shinjuku-ku, Tokyo 163-8677 JAPAN (Ogawa, M.)
Abstract	This paper proposes a robust nonlinear controller for a stage control of a vertical scanner in atomic force micro-scope to improve a settling time compared to a conventional PI controller, which results in a faster scanning on a sample surface. The physical model of the whole measurement system with respect to a vertical stage control is mainly described by two linear subsystems and a nonlinear and nonsmooth subsystem with a unmatched disturbance generated from a change of shape in a sample surface. First, we propose an approximation model in which a nonsmoothness that is generated by repetitive collisions between cantilever and sample surface is virtually converted into an additional nonsmooth disturbance. Then, the control problem is to design a feedback controller to compensate the two unmatched disturbances as fast as possible. With the object of a specification of a general AFM product, we assume that only output signal is available. Then, a controller including both a softened switching action and a PI compensator is introduced. Simulation results show our superiority in fast response compared to a conventional PI controller.
Starting Page	539
Ending Page	544
File Size	982724
Page Count	6
File Format	PDF
ISBN	9781467345033
ISSN	10851992
e-ISBN	9781467345057
e-ISBN	9781467345040
DOI	10.1109/CCA.2012.6402658
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-10-03
Publisher Place	Croatia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Approximation methods Switches Mathematical model Shape Force Surface topography
Content Type	Text
Resource Type	Article

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