NDLI: Efficient mixed-domain analysis of electrostatic MEMS

Content Provider	IEEE Xplore Digital Library
Author	Gang Li Aluru, N.R.
Copyright Year	2002
Description	Author affiliation: Beckman Inst. for Adv. Sci. & Technol., Illinois Univ., Urbana, IL, USA (Gang Li; Aluru, N.R.)
Abstract	We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method based interior mechanical analysis with a boundary cloud method based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analyses. Meshless finite cloud and boundary cloud methods combined with fast algorithms and Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis. Numerical results are presented for an electrostatic comb drive device.
Sponsorship	IEEE Circuits & Syst. Soc. IEEE Comput. Soc. ACM/SIGDA
Starting Page	474
Ending Page	477
File Size	333639
Page Count	4
File Format	PDF
ISBN	0780376072
ISSN	10923152
DOI	10.1109/ICCAD.2002.1167574
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-11-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatic analysis Micromechanical devices Clouds Lagrangian functions Performance analysis Finite element methods Magnetic analysis Conductors Algorithm design and analysis Couplings
Content Type	Text
Resource Type	Article
Subject	Computer Graphics and Computer-Aided Design Computer Science Applications Software

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