NDLI: Schematic-based lumped parameterized behavioral modeling for suspended MEMS

Content Provider	IEEE Xplore Digital Library
Author	Jing, Q. Mukherjee, T. Fedder, G.K.
Copyright Year	2002
Description	Author affiliation: Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA (Jing, Q.; Mukherjee, T.; Fedder, G.K.)
Abstract	Schematic-based lumped parameterized behavioral modeling and simulation methodologies have become available since the emergence of analog HDLs. They greatly ease iterative hierarchical multi-domain simulation, which is critical to the design of MEMS. NODAS is one of such tools, with models written in VerilogA and simulation performed within the Cadence framework. This paper focuses on several key modeling issues in NODAS, including schematic representation, element communication, linear, nonlinear and multi-domain modeling, and extensibility to new physical effects, processes and physical domains. A nonlinear beam model and an electrostatic gap model are discussed as examples. Simulation comparison to finite element analyses and experimental data verifies the accuracy of the models and validates the simulation methodology.
Sponsorship	IEEE Circuits & Syst. Soc. IEEE Comput. Soc. ACM/SIGDA
Starting Page	367
Ending Page	373
File Size	547253
Page Count	7
File Format	PDF
ISBN	0780376072
ISSN	10923152
DOI	10.1109/ICCAD.2002.1167560
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-11-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Circuit simulation Analytical models Electrostatics Computational modeling Hardware design languages Space technology Design automation Solid modeling Analog computers
Content Type	Text
Resource Type	Article
Subject	Computer Graphics and Computer-Aided Design Computer Science Applications Software

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