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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jianwen Xu Wong, C.P. |
| Copyright Year | 2003 |
| Description | Author affiliation: Sch. of Mater. Sci. & Eng., Georgia Inst. of Technol., Atlanta, GA, USA (Jianwen Xu; Wong, C.P.) |
| Abstract | It is essential to find new candidate materials for embedded capacitors. This work presents the development of a novel aluminum-filled high dielectric constant composite. Aluminum is well known as a fast self-passivation and low-cost metal. The thin passivation layer forms an insulating boundary outside of the metallic spheres, which has dramatic effects on the electrical, mechanical, and chemical behaviors of the resulting composites. Influences of aluminum particle size and filler loading on the dielectric properties of composites have been studied. Due to the self-passivation nature of fine aluminum spheres, a high loading level of aluminum can be used while the composite materials continue to be insulating. Dielectric property measurement demonstrates that, for composites containing 80 wt% 3.0 m aluminum, a dielectric constant of 109 and a low dissipation factor of about 0.02 (@ 10 kHz) can be achieved. At such loading level, materials still show good processability and good adhesion toward the substrate. The developed aluminum composite is a promising candidate material for embedded capacitor applications. |
| Starting Page | 544 |
| Ending Page | 550 |
| File Size | 494243 |
| Page Count | 7 |
| File Format | |
| ISBN | 0780382056 |
| DOI | 10.1109/EPTC.2003.1271581 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-12-12 |
| Publisher Place | Singapore |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Costs Capacitors Composite materials Inorganic materials Aluminum Dielectric materials Dielectrics and electrical insulation Dielectric substrates High-K gate dielectrics Passivation |
| Content Type | Text |
| Resource Type | Article |
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