NDLI: Propagation of Bleustein-Gulyaev waves in piezoelectric layered structures with initial stress

Content Provider	IEEE Xplore Digital Library
Author	Jin, F. Kishimoto, K. Inoue, H. Tateno, T.
Copyright Year	2002
Description	Author affiliation: Dept. of Mech. & Control Eng., Tokyo Inst. of Technol., Japan (Jin, F.; Kishimoto, K.; Inoue, H.; Tateno, T.)
Abstract	Layered structures, especially thin film/coating substrate systems play important roles in micro-electro-mechanical system and microelectronics packages. Many surface acoustic wave (SAW) devices/sensors adopt the layered structures with a piezoelectric layer deposited on the substrate to achieve high performance. Surface electro-acoustic waves (Bleustein-Gulyaev waves) have very practical importance in many signal transmission, signal processing and information storage applications. In piezoelectrics, the interaction between elastic and electric field in such a wave leads to a number of new effects not observable in non-piezoelectric crystals. The propagation behavior of this kind of wave in a piezoelectric layered structure with initial stress is taken into account in this paper. Solutions of the mechanical displacement and electrical potential function are obtained for the piezoelectric layer and substrate, respectively, by solving the coupled electromechanical field equations. Influence of the initial stress on the phase velocity of B-G wave propagation and the electromechanical coupling factor corresponding to this surface wave is discussed. It is seen that the phase velocity of B-G wave propagation decreases and the electromechanical coupling factor increases remarkably as the absolute value of initial stress in the layer is greater than 100 MPa. The results reported in this paper are residual stress distribution not only meaningful for the design of SAW devices with high quality, but also effective for evaluating the residual stress distribution in the layered structures.
Sponsorship	Nat. Sci. Council Ministr. Educ
Starting Page	445
Ending Page	450
File Size	371161
Page Count	6
File Format	PDF
ISBN	078037682X
DOI	10.1109/EMAP.2002.1188880
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-12-04
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Substrates Surface acoustic wave devices Residual stresses Acoustic propagation Piezoelectric films Coatings Microelectromechanical systems Microelectronics Packaging Acoustic waves
Content Type	Text
Resource Type	Article

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