NDLI: Multifunctional humidity-gas sensor fabricated on silicon substrate

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Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium

PROCEEDINGS OF 1995 JAPAN INTERNATIONAL ELECTRONIC MANUFACTURING TECHNOLOGY SYMPOSIUM

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Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium

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Proceedings of Japan International Electronic Manufacturing Technology Symposium

Multifunctional humidity-gas sensor fabricated on silicon substrate

Content Provider	IEEE Xplore Digital Library
Author	Hara, K. Kawashima, H.
Copyright Year	1995
Description	Author affiliation: Dept. of Electr. Eng., Tokyo Denki Univ., Japan (Hara, K.)
Abstract	This paper describes a multifunctional humidity-gas sensor developed with thin-film technology, which is compatible with IC fabrication processes. The sensor is small and inexpensive, being fabricated on a silicon substrate using photolithography. The sensing material is a semiconducting Fe/sub 2/O/sub 3/-based thin film which is deposited by rf sputtering on a porous Al/sub 2/O/sub 3/ film. The impedance is measured between the top electrode (Pt) and the bottom electrode (Al). This sensor is sensitive to humidity, especially in middle and high humidity ranges at room temperature, while it is also sensitive to combustible gases such as hydrogen at 400/spl deg/C. The response time is short enough from a practical point of view.
Starting Page	158
Ending Page	161
File Size	401779
Page Count	4
File Format	PDF
ISBN	0780336224
DOI	10.1109/IEMT.1995.541017
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-12-04
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Sputtering Substrates Semiconductor thin films Electrodes Temperature sensors Humidity Sensor phenomena and characterization Thin film sensors Fabrication
Content Type	Text
Resource Type	Article

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