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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Guterman, D.C. |
| Copyright Year | 1982 |
| Description | Author affiliation: United Technologies/MOSTEK, Carrollton, Texas (Guterman, D.C.) |
| Abstract | A high density, non-volatile RAM cell composed of a volatile RAM component, merged with a non-volatile element which "shadows" the RAM component, is described. Unlike earlier low density Shadow RAM approaches, small cell size is achieved here by utilizing a vertically integrated 1T-1C DRAM element merged with a highly compact, vertically integrated, triple-level poly-silicon floating gate structure. Non-volatile operations on the floating gate stack are performed by Fowler-Nordheim electron injection through both a tunnel oxide, and through a first level to third level poly-silicon sidewall which has proven successful in earlier $E^{2}PROMs.$ The non-volatile approach lends itself readily to 5 Volt-only implementation, using on-chip voltage multiplication techniques, by virtue of the miniscule Fowler-Nordheim charging currents needed, combined with a single high voltage STORE implementation scheme using a common third level poly-Si line. Cell operation for the non-volatile BULK STORE and BULK RECALL functions as well as volatile bit operations are described. Also shown is the cell layout, which consumes 1.5 $mil^{2}area,$ based on 3µ design rules, making it readily compatible with 16K NOVRAM density levels. |
| Starting Page | 728 |
| Ending Page | 732 |
| File Size | 348936 |
| Page Count | 5 |
| File Format | |
| DOI | 10.1109/IEDM.1982.190398 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1982-12-13 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Nonvolatile memory Read-write memory Voltage Tunneling Random access memory EPROM Secondary generated hot electron injection Dielectrics Silicon Electrodes |
| Content Type | Text |
| Resource Type | Article |
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