NDLI: Finite element modeling of nickel oxide film for Au-Ni contact of MEMS switches

Content Provider	IEEE Xplore Digital Library
Author	Hong Liu Leray, D. Colin, S. Pons, P.
Copyright Year	2015
Description	Author affiliation: Malaysia Campus, Univ. of Southampton, Iskandar Puteri, Malaysia (Hong Liu) \|\| LAAS, Univ. de Toulouse, Toulouse, France (Pons, P.) \|\| Inst. Clement Ader, Univ. de Toulouse, Toulouse, France (Leray, D.; Colin, S.)
Abstract	Contamination and oxidation are inevitable in contact surfaces, especially for micro contact under low load (μN-mN). They are considered as major causes for a high contact resistance, and can lead to the failure of a contact. However, as the film formation is a complex phenomenon, it is difficult to accurately observe and characterize the film properties. In this paper, a finite element model of nickel oxide film is developed for Au-Ni contact of MEMS switches. Considering the fact that the electrical contact area is only a portion of the mechanical contact area, a so-called `nano-spots' model is developed: multiple small conductive spots are scattered on a large mechanical contact asperity, and ultrathin oxide film is located around the nano-spots. The sizes of the electrical spots and the mechanical asperity are deduced from the measured electrical resistance and a mechanical contact modeling, respectively. The simulations results show a good agreement with the experimental results. This model allows us to determine some possible geometrical configurations of contact surfaces that lead to the measured contact resistance in real devices.
Starting Page	266
Ending Page	272
File Size	759733
Page Count	7
File Format	PDF
e-ISBN	9781467393416
DOI	10.1109/HOLM.2015.7355108
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-10-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Films Finite element analysis Surface resistance Contact resistance Nickel finite element modeling MEMS switches electrical contact oxide film
Content Type	Text
Resource Type	Article

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