NDLI: Ultrathin diamondlike carbon films deposited by filtered carbon vacuum arcs

Content Provider	IEEE Xplore Digital Library
Author	Anders, A. Ryan, F.W. Fong, W. Bhatia, C.S.
Copyright Year	2000
Description	Author affiliation: California Univ., Berkeley, CA, USA (Anders, A.)
Abstract	Ultrathin (<5 nm) hard carbon films are of great interest to the magnetic storage industry as the areal density approaches 100 Gb/in/sup 2/. These films can be used as overcoats to protect the magnetic layer. Tetrahedrally bonded amorphous carbon (ta-C) films can be produced by filtered cathodic arc deposition, however, these films will be accepted by the storage industry only if the "macroparticle" issue can be solved. Better plasma filters have been developed. Emphasis is put on the promising Twist Filter system, a compact, open-architecture structure that operates with very high current (>1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been tested.
Starting Page	541
Ending Page	547
File Size	654279
Page Count	7
File Format	PDF
ISBN	0780357914
DOI	10.1109/DEIV.2000.879046
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-09-18
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Diamond-like carbon Magnetic films Magnetic separation Filters Plasma applications Magnetic memory Protection Amorphous magnetic materials Bonding Amorphous materials
Content Type	Text
Resource Type	Article

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