NDLI: Control of nano- and micro-crystalline copper electrodeposits

Content Provider	IEEE Xplore Digital Library
Author	Trzaska, M. Trzaska, Z.W.
Copyright Year	2008
Description	Author affiliation: Fac. of Mater. Sci. & Eng., Warsaw Univ. of Technol., Warsaw (Trzaska, M.; Trzaska, Z.W.)
Abstract	In this paper, electrodeposition of nano- and micro-crystalline copper films and thin-layers with direct and pulse periodic currents is effectively controlled. Electrical and physico-chemical characterizations of the copper films are realized, and the optimized electrodeposition parameters are so determined. Next, they are applied to micromolding. The attention is focused on microstructure, surface roughness, hardness, and on process parameters leading to major differences in final products. The obtained results show that the addition of a spike and a decrease in forward current can improve the throwing power in plating quality. Decrease in the grains dimension of the copper layers results in an increase of both the corrosion rate and the double layer capacitance but then charge transfer resistance decreases.
Starting Page	2196
Ending Page	2201
File Size	305339
Page Count	6
File Format	PDF
ISBN	9781424420780
ISSN	07431619
DOI	10.1109/ACC.2008.4586818
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	American Automatic Control Council(AACC)
Subject Keyword	Copper Nanostructured materials Integrated circuit interconnections Atomic force microscopy Scanning electron microscopy Corrosion Transmission electron microscopy Electric resistance Semiconductor materials Computer aided manufacturing
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in