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Content Provider | IEEE Xplore Digital Library |
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Author | Won-jong Kim Maheshwari, H. |
Copyright Year | 2002 |
Description | Author affiliation: Dept. of Mech. Eng., Texas A&M Univ., College Station, TX, USA (Won-jong Kim; Maheshwari, H.) |
Abstract | Presents high-precision control of a magnetically levitated (maglev) linear actuator with novel geometric configuration. The linear actuator is used as a unit actuator in the development of a maglev instrument with six-axis nanopositioning capability. The novel configuration in this design concept leads to a lightweight and compact size. The objective of development of this maglev linear actuator is to verify the underlying theory and fundamental working principles. The device allows a linear motion range of /spl plusmn/500 /spl mu/m with nanoscale positioning resolution. We present electromechanical design, controller design and implementation, and preliminary closed-loop experimental results with various step sizes for this linear actuator. |
Sponsorship | American Autom. Control Council IFAC SICE |
Starting Page | 4279 |
Ending Page | 4284 |
File Size | 587624 |
Page Count | 6 |
File Format | |
ISBN | 0780372980 |
ISSN | 07431619 |
DOI | 10.1109/ACC.2002.1024605 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2002-05-08 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | American Automatic Control Council(AACC) |
Subject Keyword | Magnetic levitation Hydraulic actuators Nanopositioning Atomic force microscopy Instruments Manufacturing Testing Size control Nanotechnology Scanning probe microscopy |
Content Type | Text |
Resource Type | Article |
Subject | Electrical and Electronic Engineering |
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