NDLI: Ultrathin SiO2 interface layer growth

Content Provider	IEEE Xplore Digital Library
Author	Bevan, M.J. Curtis, R. Guarini, T. Liu, W. Hung, S.C.H. Graoui, H.
Copyright Year	2010
Description	Author affiliation: Applied Materials Inc, 974 E. Arques Avenue, Sunnyvale, CA 94085, USA (Bevan, M.J.; Curtis, R.; Guarini, T.; Liu, W.; Hung, S.C.H.; Graoui, H.)
Abstract	A variety of processes based on radical oxidation (N2O/H2) and spike RTO are investigated in this study to grow ultrathin SiO2 layers. Their process space is mapped out to cover regimes of interest for gate-last or gate-first integration of high k dielectrics with metal gates. Applied's Centura RTP chamber is found to be readily compatible with the requirements associated with 22/20nm CMOS technology.
Starting Page	154
Ending Page	156
File Size	988615
Page Count	3
File Format	PDF
ISBN	9781424484003
ISSN	1944026X
e-ISBN	9781424484010
DOI	10.1109/RTP.2010.5624252
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-09-28
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Ultrathin SiO2 interface layer growth