NDLI: Millisecond Annealing with Flashlamps: Tool and Process Challenges

Content Provider	IEEE Xplore Digital Library
Author	Gebel, T. Rebohle, L. Fendler, R. Hentsch, W. Skorupa, W. Voelskow, M. Anwand, W. Yankov, R.A.
Copyright Year	2006
Description	Author affiliation: FHR Anlagenbau GmbH, Ottendorf-Okrilla (Gebel, T.; Rebohle, L.; Fendler, R.; Hentsch, W.)
Abstract	Sub-second annealing is one of the key issues to meet the requirements of the 45 nm technology node according to the ITRS roadmap. Therefore, over the past decade there has been great interest in techniques such as laser and flash lamp annealing (FLA). In addition, advanced ultra-fast annealing shows promise for technologies that are not directly related to Si device processing. The main reason for using FLA in alternative applications is the reduced thermal budget because of the short annealing time, which enables one to achieve high temperatures (> 500degC) in the near-surface region while keeping the substrate bulk relatively cold. This is of particularly high importance for the development of novel polymer-based electronics and flexible solar cell technologies, where the substrates cannot withstand temperatures in excess of 150degC. An overview of theoretical simulations and related results from FLA experiments for a variety of layered systems is given. The influence of the flash duration and intensity on the heat distribution and the resulting physical properties is considered. Design and performance issues of the FLA tools depending on the specific uses and technical requirements are addressed. Furthermore, topics covered include high-throughput applications e.g. for roll-to-roll production of polymer substrates. Results of a prototype tool for multi-flash processing up to a frequency of 1 Hz using a pulse duration of 1 ms are also discussed
Starting Page	47
Ending Page	55
File Size	1671572
Page Count	9
File Format	PDF
ISBN	142440648X
DOI	10.1109/RTP.2006.367981
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-10
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lamps Temperature Substrates Polymers Photovoltaic cells Rapid thermal annealing Thermal conductivity Ion beams Physics Optical materials
Content Type	Text
Resource Type	Article

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