NDLI: Generating Cycle Time-Throughput Curves using Effective Process Time based Aggregate Modeling

Content Provider	IEEE Xplore Digital Library
Author	Veeger, C.P.L. Etman, L.F.P. van Herk, J. Rooda, J.E.
Copyright Year	2008
Description	Author affiliation: Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven (Veeger, C.P.L.; Etman, L.F.P.)
Abstract	In semiconductor manufacturing, cycle time-throughput (CT-TH) curves are often used to make a trade-off between throughput and mean cycle time of bottleneck workstations. To generate CT-TH curves, detailed simulation models, and analytical queueing approximations are typically used. However, detailed models require much development time and are computationally expensive. Analytical models based on for instance a closed-form G/G/m queueing expression may not generate accurate curves for semiconductor equipment, in particular for equipment that have wafers of multiple lots in process at the same time. In this paper we show that a recently developed aggregate modeling approach based on the effective process time is able to generate more accurate CT-TH curves for equipment with multiple process steps.
Starting Page	127
Ending Page	133
File Size	261555
Page Count	7
File Format	PDF
ISBN	9781424419647
ISSN	10788743
DOI	10.1109/ASMC.2008.4529038
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-05-05
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Aggregates Semiconductor device manufacture Workstations Semiconductor device modeling Analytical models Throughput Virtual manufacturing Queueing analysis Production facilities Tellurium factory dynamics cycle time simulation CT-TH curves manufac-turing performance
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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