NDLI: New Tool for Targeting Energy Improvements in Semiconductor Manufacturing Equipment

Content Provider	IEEE Xplore Digital Library
Author	Naughton, P.
Copyright Year	2006
Description	Author affiliation: Int. SEMATECH Manuf. Initiative, Austin, TX (Naughton, P.)
Abstract	Resource consumption directly impacts the cost of semiconductor manufacturing and indirectly contributes to increases in global warming. Since 1996, several resource conservation projects and surveys have been performed at SEMATECH, its member companies, and semiconductor manufacturing equipment (SME) suppliers. Significant reductions in SME resource consumption are possible, but are they enough? The International Technology Roadmap for Semiconductors (ITRS) continues to challenge new fobs and SME designers to meet ever-decreasing energy goals. The World Semiconductor Council has issued their white paper on energy suggesting normalized energy reductions for wafer fabs. To achieve measurable reductions, both factory owners and SME suppliers will need to baseline their energy consumption and establish specific targets for improvement. Target setting must include the total energy requirements for process equipment, its support components (e.g., vacuum pumps, abatement devices, chillers), and all support utilities (e.g., power, water, compressed air, etc.). To measure, track, and report the progress towards improvement goals, a total equivalent energy (TEE) tool is presented. One of the key components of the TEE methods to be addressed is the use of energy conversion factors (ECFs)
Starting Page	428
Ending Page	432
File Size	401079
Page Count	5
File Format	PDF
ISBN	1424402549
ISSN	10788743
DOI	10.1109/ASMC.2006.1638796
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-05-22
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Semiconductor device manufacture Energy measurement Costs Global warming Councils Production facilities Energy consumption Elementary particle vacuum Target tracking Energy conversion
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Measurement of conservation of energy by semiconductor manufacturing equipment and setting of targets for improvements

Samsung Equivalence Test for Output Parameters in Semiconductor Manufacturing

Automating complex wafer manufacturing - beyond lot to tool assignment

Overall equipment effectiveness in resist processing equipment

Development of cost of ownership modeling at a semiconductor production facility

FAROS - Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing

Scheduling semiconductor device test operations

Device Under Test (DUT) Socket Conversion to Improve Analog Loadboard Performance Efficiency

The knowledge management system for the equipment maintenance technology

New Tool for Targeting Energy Improvements in Semiconductor Manufacturing Equipment

Similar Documents

Measurement of conservation of energy by semiconductor manufacturing equipment and setting of targets for improvements

Samsung Equivalence Test for Output Parameters in Semiconductor Manufacturing

Automating complex wafer manufacturing - beyond lot to tool assignment

Overall equipment effectiveness in resist processing equipment

Development of cost of ownership modeling at a semiconductor production facility

FAROS - Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing

Scheduling semiconductor device test operations

Device Under Test (DUT) Socket Conversion to Improve Analog Loadboard Performance Efficiency

The knowledge management system for the equipment maintenance technology

New Tool for Targeting Energy Improvements in Semiconductor Manufacturing Equipment