NDLI: Bitmapped yield enhancement solutions: a case study of escalating yield

Content Provider	IEEE Xplore Digital Library
Author	Jacobson, L. Crain, D. Joyce, C.
Copyright Year	2000
Description	Author affiliation: Nat. Semicond., USA (Jacobson, L.)
Abstract	National Semiconductor has an ongoing commitment to its customers to provide rapid product development, comprehensive cycles of learning, and world class yields. Through the development of systems which move bitmapping from engineering tools requiring massive effort to maintain and run, to the highly automated arena of manufacturing, a much finer partitioning of yield, and a more effective deployment of yield enhancement resources may result. Tying in a vast optical and SEM review infrastructure allows for extremely rapid feedback for inline detectable anomalies, including optical and SEM images for each inspected lot. Bitmapping as the framework for rapid failure analysis provides the accuracy needed to rapidly identify and assign root cause to failures not found with inline inspection tools. Development of the highly integrated and automated bitmapping system at National Semiconductor has enabled extremely rapid yield learning rates and is a key component in the ability to maintain world class yields with leading edge technologies. Looking forward, bitmapping will accelerate yield learning, and hold an important role in process development as we bring feature sizes of 0.13u and below into high volume manufacturing.
Starting Page	139
Ending Page	140
File Size	180030
Page Count	2
File Format	PDF
ISBN	0780359216
ISSN	10788743
DOI	10.1109/ASMC.2000.902574
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-09-12
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical feedback Automatic optical inspection Ultraviolet sources Product development Maintenance engineering Manufacturing automation Semiconductor device manufacture Optical detectors Failure analysis Lead compounds
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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