NDLI: Multiple applications of an automatic defect review SEM in semiconductor manufacturing yield enhancement

Content Provider	IEEE Xplore Digital Library
Author	Hance, B.
Copyright Year	2000
Description	Author affiliation: Adv. Micro Devices, Austin, TX, USA (Hance, B.)
Abstract	An automatic defect review SEM (DRSEM) has many improvements over traditional manual review SEMs. These include high throughput, consistent image quality, reduced operator training, hands off operation, and automatic defect classification. These features have made the DRSEM useful in multiple aspects of a yield enhancement strategy. Optical classification has been replaced by automatic defect classification using the DRSEM at multiple baseline inspection steps. Improvements have been observed in both classification accuracy and consistency over manual classification. In addition, the topographical information obtained by the DRSEM has enabled the correct distinction of optically similar defects, such as partial height metal pattern and tungsten filled ILD holes. The DRSEM has also been successfully used for selective review of ambiguous or unknown defects seen during optical review of defect excursions. The high throughput of the DRSEM has made it practical to perform SEM review of full wafer lots in the evaluation of defect reduction experiments. Defect reduction process change experiments are typically evaluated based on defect density, which is susceptible to previous layer defects. The DRSEM has proven most useful in separating the defects of interest from previous layer defects, and speeding experimental analysis. Finally, the DRSEM has help reduce recipe setup time on defect inspection tools by assisting in the evaluation of true defects versus false or nuisance counts.
File Size	65641
File Format	PDF
ISBN	0780359216
ISSN	10788743
DOI	10.1109/ASMC.2000.902571
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-09-12
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Manufacturing automation Semiconductor device manufacture Throughput Automatic optical inspection Engineering management USA Councils Metrology Image quality Tungsten Performance evaluation
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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