NDLI: Sensorization in a photolithography coat process

Content Provider	IEEE Xplore Digital Library
Author	McCaslin, M.W.
Copyright Year	1995
Description	Author affiliation: Motorola Inc., Austin, TX, USA (McCaslin, M.W.)
Abstract	The growth of automation and automatic data collection in the semiconductor industry is providing engineers and manufacturers with an unprecedented insight into their processes and is crucial in the trend toward higher quality and error free processing. Some of the immediate benefits of automation are real time monitoring of process conditions, reduction in equipment downtime due to qualification testing, real time Statistical Process Control (SPC), elimination of operator induced error in equipment measurements, and process risk reduction. These benefits and others were realized through the implementation of a real time temperature monitoring system on a photolithography coat track. The system provides full time temperature monitoring, automatic SPC data logging during actual process conditions, state driven control of track interlock to prevent out of limit processing and process data tracking for real time performance of wafer bake stations. The system was realized by implementing a C-based state logic program in the QNX Windows real time operating system to drive Keithley METRABUS hardware monitoring SVG 8600 coat tracks.
Starting Page	174
Ending Page	177
File Size	517462
Page Count	4
File Format	PDF
ISBN	0780327136
ISSN	10788743
DOI	10.1109/ASMC.1995.484363
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-11-13
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lithography Manufacturing automation Real time systems Computerized monitoring Condition monitoring Temperature measurement Temperature sensors Electronics industry Data engineering Manufacturing processes
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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