NDLI: Growth of GaN on a nanoscale periodic faceted Si substrate by metal organic vapor phase epitaxy

Content Provider	IEEE Xplore Digital Library
Author	Lee, S.C. Sun, X.Y. Hersee, S.D. Lee, J. Ziang, Y.-B. Xu, H. Brueck, S.R.J.
Copyright Year	2004
Description	Author affiliation: Center for High Technol. Mater., New Mexico Univ., Albuquerque, NM, USA (Lee, S.C.; Sun, X.Y.; Hersee, S.D.; Lee, J.)
Abstract	Growth of GaN on a nanoscale periodic faceted Si substrate by metal organic vapor phase epitaxy is reported. The surface of the Si(001) substrate is patterned with a one-dimensional, 355-nm period array of grooves. Each groove consisted of two facing Si{111} stripe facets separated by upper and lower Si(001) surfaces. GaN deposition on this groove array shows a strong selectivity with epitaxial growth of the hexagonal phase on the Si {111} facets being dominant. The initial stage of GaN growth appears to be amorphous. This is followed by GaN containing a high-density of stacking faults to accommodate the large lattice mismatch strain but the defect density decreases as growth proceeds. Lateral overgrowth from the Si{111} facets toward neighboring Si(001) facets leads to coalescence between GaN from opposing Si{111} facets. These GaN regions have misaligned c-axes and the crystal structure becomes unstable as they merge, resulting in a phase transition from hexagonal to cubic at the coalescence region. Experimental results of GaN grown on a nanoscale faceted Si surface including: nucleation, crystal structure, and lateral growth depending on Si orientation are presented.
Starting Page	15
Ending Page	21
File Size	398242
Page Count	7
File Format	PDF
ISBN	0780386140
DOI	10.1109/ISCSPC.2003.1354425
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-08-25
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gallium nitride Substrates Epitaxial growth Surface morphology Thermal conductivity Lattices Phased arrays Scanning electron microscopy Sun Materials science and technology
Content Type	Text
Resource Type	Article

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